MEM 4621 Introduction to Micro-Electro-Mechanical Systems (MEMS) 3.0 Credits
This course covers the fundamentals of microfabrication technologies, including materials, core processes, and applications. Students are introduced to conventional semiconductor‑industry methods such as photolithography, wet and dry etching, deposition, and surface micromachining, as well as nonconventional techniques including soft lithography, polymer micromachining, and laser micromachining. The course reviews MEMS devices—sensors, actuators, bioMEMS, and lab‑on‑a‑chip systems—and examines microfluidic fundamentals, flow behavior at the microscale, and the design of microfluidic and lab‑on‑a‑chip devices.
Repeat Status: Not repeatable for credit
Prerequisites: (MEM 2310 [Min Grade: D] and MEM 2410 [Min Grade: D]) or (MEM 202 [Min Grade: D] and MEM 210 [Min Grade: D])